Nikon iNEXIV VMZ-R6555 - Automated Measuring Systems - Measuring

Magnification, AF and illumination conditions can be finely adjusted for each specimen.

VMZ-R6555 offers 650 x 550 mm stroke, which is suitable for large components and “step-and-repeat” measurements of multiple pieces on the stage.

Highligths:

Six Types of Optical Zooming Head

Detection of 0.1 mm Transparent Layer

8-segment Ring Illumination with Three Incident Angles

Measuring Accuracy is Further Improved

Faster Throughput

15x High-speed Zoom

Six Types of Optical Zooming Head

Standard magnification zooming heads: type 1 - 3

Standard magnification zooming heads

Type 1, 2 and 3, have Nikon 15× zoom optics with a long working distance, wide FOV and a high NA 0.35. They come with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with three incident angles.

High magnification zooming heads: type 4, TZ

High magnification zooming heads

Type 4 and TZ have Nikon 15× and 120× zoom optics with higher magnification and a higher NA 0.46. Type 4 comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with a 50-degree incident angle. TZ has LED episcopic, diascopic (for higher magnification) and darkfield illuminators.

Wide field-of-view zooming head: type A

Wide field-of-view zooming head

Type A features Nikon 10× zoom optics with the widest FOV, the longest working distance and the highest NA 0.11. It comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with an 18-degree incident angle.

Detection of 0.1 mm Transparent Layer

Designed to detect the surfaces of thin transparent materials, the new TTL Laser AF works with the same high speed and high accuracy as the VMR series Laser AF.

8-segment Ring Illumination with Three Incident Angles

Standard magnification zooming heads (type 1-3) come with 8-segment LED inner and outer ring illuminators as well as episcopic and diascopic illuminators. Incident angles of 37, 55 and 75 degrees, illumination directions by combining any 8-segment lights and light intensity can be adjusted.

Measuring Accuracy is Further Improved

Measuring accuracy is further improved with high resolution linear encoder ‘ModuRay’ developed by Nikon.

Faster Throughput

High rate of data transfer combined with fast illumination control provides faster throughput.

15x High-speed Zoom

5-step high-speed zoom with a zoom ratio of 15x allows both wide field-of-view at low magnification and high-resolution observation at high magnification (type 1 – 4).

Stroke (X x Y x Z)	650 x 550 x 200 mm (25.6 x 21.7 x 7.8 in.) 600 x 550 x 200 mm (23.6 x 21.7 x 7.8 in.) (with type TZ, at low magnification)
Minimum Readout	0.01 μm
Maximum Workpiece Weight	50 kg (110.2 lb.)
Measuring Uncertainty	EUX, MPE EUY, MPE: 1.2+4L/1000 μm EUXY, MPE: 2+4L/1000 μm
Z measurement Uncertainty	EUZ, MPE: 1.2+5L/1000 μm (with Laser AF)
Camera	Black & white 1/3” CCD, Color 1/3” CCD (option)* * For type 1, 2 and A only
Working Distance	Type 1/2/3: 50 mm (with 37° illumination), 36 mm (with 55° illumination), 10 mm (with 78° illumination) Type 4: 30 mm Type TZ: 11 mm with the main objective lens and 32 mm with the left objective lens Type A: 73.5mm (63 mm with laser AF)
Magnification vs. Field of View	Type 1: 0.5 - 7.5x / 9.33 x 7 - 0.622 x 0.467 mm Type 2: 1 - 15x / 4.67 x 3.5 - 0.311 x 0.233 mm Type 3: 2 - 30x / 2.33 x 1.75 - 0.155 x 0.117 mm Type 4: 4 - 60x / 1.165 x 0.875 - 0.07 x 0.068 mm Type TZ: 1 - 120x / 4.67 x 3.5 - 0.039 x 0.029 mm Type A: 0.35 - 3.5x / 13.3 x 10 - 1.33 x 1 mm
Auto Focus	Type 1, 2, 3, 4 and TZ come with TTL laser AF and vision AF Type A comes with vision AF as standard and with laser AF as an option
Illumination	Type 1/2/3: LED episcopic and diascopic illuminators, 8-segment LED inner and outer ring illuminators (37 degree incident angle with inner ring and 55 and 78 degree incident angles with outer ring) Type TZ: LED episcopic, diascopic (for main objective lens) and darkfield illuminators Type 4/A: LED episcopic and diascopic illuminators, 8-segment LED ring illuminator (with oblique angle of 50 degree: type 4, 18 degree: type A)
Power Source	AC 100-240V 50/60Hz
Power Consumption	5A-2.5A
Dimensions & Weight (W x D x H)	Main unit & table: 1200 x 1640 x 1820 mm / 665 kg (47.2 x 52.8 x 64.6 in. / 1466 lb.) Controller: 190 x 450 x 440 / 15 kg (7.5 x 17.7 x 17.3 in. / 33 lb.)
Footprint	2400 x 2000 mm