Nikon NEXIV VMZ-K6555 - Automated Measuring Systems - Measuring

The Nikon Confocal NEXIV VMZ-K6555 was developed on the strength of Nikon’s leading opto-mechatronics (optical, mechanical and electronic) technologies. It incorporates a variety of confocal optics for fast and accurate evaluation of fine three-dimensional surface metrology, image processing technology, and TT L laser autofocus. It allows both 2D and height measurements in the same field of view.

The Confocal NEXIV VMZ-K6555 is used for the inspection and measurement of critical dimensions of highly complex structures on advanced semiconductor devices, probe cards, substrate patterns on circuit boards, MEMS and a variety of other demanding applications.

Applications:

IC packages: flip chip/COF (Bump)/COG, CSP (FBGA)/SIP (Bump, Wire), Interposer (pad height)
MEMS
Probe card (silicon probe, Au probe)
Precise glass components (micro lens, contact lens)
Photo spacer width/height for color filter for FPD panel

Confocal Objective Lenses

Confocal Objective Lenses: 1.5x - W.D. 24mm, 3x - W.D. 24mm, 7.5x - W.D. 24mm

Advanced Image Processing

Advanced image processing enhances contrast and fidelity with powerful edge detection to ensure accuracy and repeatability.

Height Measurement

Fast, confocal high precision height measurement 0.35 at 2 sigma in 1.5 second cycle time.

Automeasure Software

New, easy-to-program, versatile VMR Automeasure software includes CAD reader, offline programming, profiling software and programming wizards.

Defect-free Progressive B/W CCD

Faster image acquisition and system speed with selected defect-free instrument grade progressive scan black and white CCD camera.

Ideal Applications

Ideal for measuring micro-dimensional 2D and 3D workpieces, all requiring exceptionally high accuracy. Examples include bump heights on advanced IC packages, MEMS, probe card, micro lens, contact lenses, photo spacers for color FPD panel, molds and others.

Confocal Technology Advantages

Widely used in bio-science research, confocal microscopy offers several advantages over conventional optical microscopy, including controllable depth of field, the elimination of image degrading out-of-focus information, and the ability to collect serial optical sections from material samples. The key to the confocal approach is the use of spatial filtering to eliminate flare in material sample images. The Nikon Confocal NEXIV uses a Nipkow disk, which features multiple, symmetrically placed spirals of pinhole apertures through which light is passed and split into mini-beams. As the disk rotates, each beam scans across a portion of the sample field and generates a 3D image. The image is projected into a digital CCD camera using optical sectioning technology. The result is a 3D image captured in one scan delivering highly accurate and reliable height measurement data.

Advanced Optics

Advanced Nikon optics provide superior images for improved repeatability and accuracy.

Telecentric Zoom

5-step 15x telecentric zoom (15:1) magnification to cover different fields of view and resolution requirements.

300 x 400 x 150mm Stage

Fast, accurate and durable - 300 X, 400Y mm travel with cast Mehanite stage with 150mm Z.

Improved Stage Accuracy

Improved stage accuracy with new lower coefficient of expansion 0.1µm resolution scales.

Large Diameter Ballscrew

Precision ground large diameter ballscrew with DC servo motors for high speed and stiffness.

TTL Laser Autofocus

Vision and TTL laser autofocus. High speed through-the-lens laser scans 1000 points/sec. with 0.5µm Z accuracy at 2 sigma.

Magnification	3x 7.5x 15x 30x
W.D.	4 x 3mm 1.6 x 1.2mm 0.8 x 0.6mm 0.4 x 0.3mm
Height Measurement Repeatability (2σ)	0.35µm 0.25µm 0.25µm 0.20µm
Height Measurement Resolution	0.01µm
Zooming Method	Motorized 5-step zoom
Field of View	4 x 3mm to 0.27 x 0.2mm 1.6 x 1.2mm to 0.11 x 0.08mm 1.26 x 0.95mm to 0.1 x 0.074mm 0.63 x 0.47mm to 0.05 x 0.04mm
Illumination	White LED diascopic and episcopic illuminator for all types, White LED ring light for type 3x and 7.5x
Auto Focus	Vision AF and TTL laser AF (Scan Mode available)
Stroke (X, Y, Z	300 x 400 x 150mm
Guaranteed Loading Capacity	30kg
Maximum Permissible Error MPEE1	1.5 + 2.5L/1000µm
MPEE1Y	2.5 + 2.5L/1000µm
Maximum Permissible Error of Z Axis MPEE1Z	1 + L/1000µm
Main Unit Weight	830kg
Power Source/ Power Consumption	AC 100 to 240 V ± 10% 50/60 Hz / 13A to 6.5A
Operating Condition	Temperature: 20°C ± 0.5K, Humidity: 70% or less
Acquired Standard	CE marking (low voltage/EMC/laser)
Footprint	2500 x 1900mm