Lasertec Optelics Hybrid Laser Microscope - Confocal Microscopes - Microscope Inspection

Powerful and Versatile

A hybrid confocal scanning laser microscope that combines 405nm laser and full-color confocal optics in one body for high versatility and functionality.

OPTELICS® HYBRID is a new type of confocal scanning laser microscope, which combines optical technologies of 405nm scanning laser and full-color confocal in a single microscope. The new hybrid microscope is designed to achieve high resolution and multi-functionality at the same time.

The background behind development of this new microscope is a global trend toward enhanced performance of consumer and industrial products for better energy efficiency and environmental protection. Efforts are being made to explore various new materials that can reduce energy consumption in industry areas such as semiconductor devices, metals, resins, and high-tech materials. There are increasing demands for microscopic observation of surface structures and other characteristics of materials during development and production processes in diverse applications with a high level of measurement speed and accuracy.

Scanning laser microscopes have been widely used in a variety of applications because they can observe and measure surface topography of various samples at the micron scale with ease of operation. Today, however, the needs of nanometer-scale measurement have increased dramatically and, at the same time, higher versatility and functionality are becoming more important because of widening applications. From the perspective of operation efficiency, it is desirable to use a single microscopic device that meets both requirements, but existing microscopes had a limited capability in that sense.

OPTELICS® HYBRID is designed to meet such needs by integrating optical technologies of scanning laser microscope and full-color confocal microscope into a single body for the first time in the world. It is a highly versatile microscope with high magnification and resolution capability and wide field of view while it can perform topography and film thickness measurements using optical interferometry and spectroscopic reflectometer.

High Resolution

A 405nm laser enables high-magnification high-resolution observation to be performed for clear visualization of extremely fine-structured samples.

Wide FOV

The field of view is approximately 1.6 times wider than that of the typical scanning laser microscope for higher operation efficiency.

Nano-scale Measurement

Optical interferometry, spectroscopic reflectometer, and atomic force microscope (AFM) are available for measurement of nanometer-scale structures (AFM is optional).

Wavelength Selection

A wavelength can be selected from 6 different wavelengths for optimum observation and measurement of each sample.

High-resolution Full-color Imaging

Color confocal optics provides high-resolution full-color images with high depth of field.

Powerful, Fast Processing

15 frames per second, one of the fastest in the industry, achieving stress-free operations thanks to Lasertec’s high speed scanning technology.

User Friendly

User-friendly GUI enables users to perform high-level measurement and analysis easily. By adopting an operation guidance system, OPTELICS® HYBRID has eliminated the necessity of manuals.

One Click Measuring

With one click, optimized setting and automated measurement can be performed. OPTELICS® HYBRID can be operated using macros to record and repeat skilled operations of expert users.

Options

A variety of options are available for further performance enhancement including: AFM (already mentioned above); high NA objective lenses software for automated measurement of width, height, surface roughness and others; and software for automated measurement of particles and defects on the entire surface of wafers and others.

Applications

Observation and measurement of various samples including semiconductor materials and devices, transparent films, ITO films, MEMS, coating materials and films, inorganic and organic materials, biological samples, metal parts, and plastic parts.

For full specifications, please download the product brochure.

Observation Functions	High resolution laser-light observation, full-color confocal observation, differential interference observation
Measurement Functions	3D display, height, surface roughness, calculation of geometrical properties (area, volume, surface area, etc.), patchwork, etc.
Height Measurement	Accuracy ± (0.11＋L/100)um, repeatability (σ) 0.01um
Width Measurement	Accuracy ± (0.02 × {100 / magnification of objective lens }＋L/100)um; repeatability (3σ) 0.01um
Frame Rates	15Hz to 120Hz
Wavelength Selection	436nm, 486nm, 514nm, 546nm, 578nm, 633nm
Interferometry	1nm accuracy in depth measurement (Z-axis direction)
Film Thickness Measurement	Spectroscopic reflectometer
Ease of Use	Fully-automated operation, operation guidance, macros, etc.
Options	Auto-measurement software, auto-inspection software