Nikon Eclipse L200N IC Inspection Microscopes

Overview
Features
Specifications
Digital Imaging

Incorporating CFI60 optics for flawless inspection of 200mm wafers and masks

Combined with Nikon's superior CFI60 LU/L optical system and an extraordinary new illumination system, this microscope provides images with greater contrast, high resolving power and darkfield images three times brighter than before. Used independently, or in combination with wafer loaders, the L200 series performs exceptionally precise optical inspection of wafers, photo masks, reticles and other substrates.

Applications:

Antennae
Telecom and electronics
Wafers
Telescope optics
Mobile phones, shavers and watches

3 Models to Choose From

L200: Offers 200mm wafer and mask inspection capabilities for reflected light illumination defect identification with various observation methods such as brightfield, darkfield, simple polarizing and DIC.

L200ND: Offers 200mm wafer and mask inspection capabilities for both transmitted and relfected light illumination. In addition to the observation methods of the L200N, epi-fluorescence observations including 365nm UV exicitation is possible.

Contamination Safeguards

The bodies of these microscopes are finished with electrostatic discharge coatings to prevent foreign particles from adhering to the microscope. Furthermore, the motorized nosepiece uses a shielded center motor that traps foreign particles inside, preventing them from falling onto the sample.

High Intensity Halogen Illumination

The high intensity 12V-50W halogen illuminator, (LV-LH50PC) provides greater brightnessthat than of a 12V-100W halogen illuminator with half the power consumption. This new lamphouse incorporates a rear mirror and optimized lamp filament size to allow effective and uniform illumination on the pupil plane which is critical in an optical plane.

Improved DIC Microscopy

Nikon’s CFI LU Plan objectives allow the use of multiple observation techniques, including brightfield, darkfield, and Nomarski DIC using a single objective. For DIC, simply insert a single Nomarski prism into the nosepiece that works for all magnification ranges.

SEMI S2-0200, S8-0600 Compliant Design

Incorporating a SEMI-compliant design, controls and knobs are positioned low and close to the operator while the eyepoint is set at the ideal height for comfortable operation. With the controls located comfortably in the microscope base, hand movement is minimal, allowing concentration on the inspection process. The eyepiece is moved closer to the operator so that he or she can assume a more erect sitting posture. This also positions the operator farther from the stage to provide a more ergonomic and safe viewing position.

Tilting Eyepiece Tube

The eyepiece tube is of the trinocular tilting type, allowing continuous adjustment of the tilt angle from 0° to 30° for viewing at the optimum eyepoint level. The eyepiece also features an ultra-widefield design and has an F.O.V. of 25mm.

Fixed-Position X-Y Fine-Movement Controls

The X-Y fine-movement controls remain in the same position, close to the front, for a comfortable viewing posture regardless of the stage position. In addition, these controls, plus the focus knob, are located close to each other so you can operate both with one hand.

Motorized Nosepiece with Software Control

The motorized universal nosepiece for the L200N series microscope has improved centricity and is three times more durable than conventional models. It also contains an anti flash mechanism to protect the operators eyes when the nosepiece is rotated. The L200A built in motorized nosepiece includes a slot for DIC attachments, features a mechanical click stop and is controlled by software that enables the system to stop precisely at each respective objective position.

CFI60 Optical System

Provide outstandingly clear, sharp images with longer working distances, high numerical aperture (NA) and minimal flare. Signal to background ratios during darkfield observations are three times better than before to provide outstanding high contrast images ideal for high precision observations.

Vibration Isolation

Applying computer-aided engineering (CAE), Nikon increased the rigidity of the L200 series dramatically, making these microscopes three times less susceptible to floor vibrations when compared with conventional equipment. This, in turn, reduces the chance of unwanted blur or image shifts even during high magnification observations. While this superior design increases stability, it also results in a smaller footprint.

Eclipse L200N Series Specifications

Main Body

Built-in Episcopic Illumination; built-in power sources for motorized control; motorized control for nosepiece; light intensity control; aperture diaphragm control

Focusing Mechanism

Cross travel: 29mm; Coarse: 12.7mm per rotation (torque adjustable, refocusing mechanism provided); Fine: 0.1mm per rotation (in 1µm increments)

Episcopic Illuminator

12V/100W halogen lamp light source built-in; motorized aperture diaphragm (centerable); fixed field diaphragm (with focus target); pinhole slider (optional) can be mounted; four 25mm filters (NCB11/ND4/ND16/GIF) can be mounted; polarizer; analyzer

Nosepiece

Fixed-motorized Sextuple Universal Nosepiece; slot for DIC attachment provided

Eyepiece Tube

L2TT Ultrawide tilting trinocular eyepiece tube (tilt angle 0-30°, erect image); F.O.V.: 25mm; optical path changeover: 2-way (binocular:photo 100:0/0:100)

Stage

8 x 8 Stage; stroke: 205 x 205mm; coarse/fine movement changeover possible; fixed-position X-Y fine-movement controls

Eyepieces

CFI eyepiece lens series

Objectives

CFI60 LU/L Plan series

Weight

43.75 kg (96.45 lbs) when 8 x 8 stage and L2TT eyepiece tube are used

Compliance

SEMI S2-93A, S8-95, CE, UL

L200A

Observation Method

Brightfield, Darkfield, DIC, Simple Polarizing

Main Body

Episcopic Stand with attached Universal Nosepiece - Power Supply built-in

Focusing Mechanism

Stroke: 29mm; Coarse: 12.7mm per rotation (torque adjustable, focusing stop mechanism provided); Fine 0.1mm per rotation (in 1µm increments); Guide: 4-guide (two roller-race, torque adjustable)

Episcopic Illuminator

Motorized aperture diaphragm (centerable, pinhole slider incorporated); fixed field diaphragm (with focus target); four 25mm filters (NCB11/ND4/ND16/GIF) can be mounted; Polarizer; Analyzer

Light Source

100W Halogen - 100W Mercury - 75W Xenon - 150W Metal Halide

Eyepiece Tube

UW Tilting Trinocular Eyepiece Tube (tilt angle 0-30°, erect images); F.O.V.: 25mm; Optical Path Changeover: 2-way (Binocular: Photo 100:0/0:100)

Nosepiece

Fixed-Motorized Sextuple Universal Nosepiece (centerable), highly durable

Stage

8 x 8 Stage; Cross Travel: 205 x 205mm, Coarse/line-movement changeover: manual; waferholders: 5-8 inch, Mask Holders 5-6 inch

Control

Front Panel: Nosepiece rotation buttons, Episcopic aperture diaphragm stop buttons, light intensity control knob; Remote Control: LCD panel, magnification changeover, motorized z-axis, episcopic aperture diaphragm stop buttons, light intensity control knob, motorized bright/darkfield changeover key, DIC adjustment knob, option keys

Eyepieces

CFI Eyepiece Lens Series

Objectives

CFI LU/L Plan Series

Auto Focus Unit

Optional (LED)

Communication

RS-232C

Weight

Approximately 45 kg (when 8 x 8 Stage and UW Eyepiece Tube are used)

Compliance

SEMI S2-0200, S8-0600, CE, UL

L200D

Main Body

Built-in Diascopic and Episcopic Illumination; built-in power sources for motorized control; motorized control for nosepiece; light intensity control; aperture diaphragm control; episcopic/diascopic changeover

Focusing Mechanism

Cross travel: 29mm; Coarse: 12.7mm per rotation (torque adjustable, refocusing mechanism provided); Fine: 0.1mm per rotation (in 1µm increments)

Episcopic Illuminator

Diascopic Illuminator

12V/100W halogen lamp light source built-in; aperture diaphragm and LWD condenser built-in

Nosepiece

Fixed-motorized Sextuple Universal Nosepiece; slot for DIC attachment provided

Eyepiece Tube

L2TT ultrawide tilting trinocular eyepiece tube (tilt angle 0-30°, erect image); F.O.V.: 25mm; optical path changeover: 2-way (binocular:photo 100:0/0:100)

Stage

8 x 8 Stage; stroke: 205 x 205mm (diascopic observation range: 150 x 150mm); coarse/fine movement changeover possible; fixed-position X-Y fine-movement controls

Eyepieces

CFI eyepiece lens series

Objectives

CFI60 LU/L Plan series

Weight

44.45 kg (97.99 lb) when 8 x 8 stage and L2TT eyepiece tube are used

Compliance

SEMI S2-93A, S8-95, CE, UL